Invention Grant
- Patent Title: Method for manufacturing TFT substrate
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Application No.: US15570754Application Date: 2017-05-03
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Publication No.: US10367016B2Publication Date: 2019-07-30
- Inventor: Zhichao Zhou
- Applicant: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Shenzhen
- Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Shenzhen
- Agency: JMB Davis Ben-David
- Priority: CN201710212917 20170401
- International Application: PCT/CN2017/082815 WO 20170503
- International Announcement: WO2018/176568 WO 20181004
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L27/12 ; H01L21/443 ; H01L21/027 ; H01L21/4757 ; H01L23/00 ; H01L29/786 ; H01L29/66 ; H01L29/24

Abstract:
A method for manufacturing a TFT (Thin-Film Transistor) substrate is proposed. The method includes utilizing a first photomask process to form a buffer layer, a data line, a source electrode, a first scan line, a second scan line, and a gate electrode on a substrate; utilizing a second photomask process to form a first insulation layer, a second insulation layer, a first semiconductor layer, and a second semiconductor layer on the substrate; and utilizing a third photomask process to form a first conductor layer, an electrical connection portion, and a drain electrode on the substrate.
Public/Granted literature
- US20180366497A1 METHOD FOR MANUFACTURING TFT SUBSTRATE Public/Granted day:2018-12-20
Information query
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