Invention Grant
- Patent Title: Wrap around contact using sacrificial mandrel
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Application No.: US15964573Application Date: 2018-04-27
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Publication No.: US10367077B1Publication Date: 2019-07-30
- Inventor: Nicolas Loubet , Adra Carr , Kangguo Cheng
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Fleit Gibbons Gutman Bongini Bianco PL
- Agent Thomas S. Grzesik
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/768 ; H01L27/088

Abstract:
A semiconductor structure and a method for fabricating the same. The semiconductor structure includes a plurality of unmerged fin structures each in contact with their own source/drain. The semiconductor structure further includes a contact layer formed on sidewalls and a top surface of each source/drain. The method includes at least the following operations. At least one mandrel layer is formed adjacent to at least one fin structure. The at least one fin structure and at least one source/drain is epitaxially grown in contact with the at least one fin structure and the at least one mandrel layer. The at least one mandrel layer is removed after the at least one source/drain has been epitaxially grown. At least one contact layer is formed in contact with sidewalls and a top surface of the at least one source/drain.
Information query
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