Invention Grant
- Patent Title: Method of manufacturing thin film transistor
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Application No.: US15520375Application Date: 2017-04-06
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Publication No.: US10367081B2Publication Date: 2019-07-30
- Inventor: Longqiang Shi
- Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Current Assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Current Assignee Address: CN Shenzhen, Guangdong
- Agent Andrew C. Cheng
- Priority: CN201710087307 20170217
- International Application: PCT/CN2017/079561 WO 20170406
- International Announcement: WO2018/149027 WO 20180823
- Main IPC: H01L29/12
- IPC: H01L29/12 ; H01L29/66 ; H01L21/02 ; H01L29/786 ; H01L21/477 ; H01L21/385

Abstract:
The present disclosure provides a thin film transistor (TFT) and its manufacturing method. The method includes the following steps: sequentially depositing a buffer layer and a shielding layer on a substrate; forming an IGZO layer on and covering the shielding layer; processing the IGZO layer by annealing so that a portion of the IGZO layer is diffused by the buffer layer and has a conductor property; and forming a source and a drain so that the source and drain contact the portion of the IGZO layer. The present disclosure, through annealing the IGZO layer, the buffer layer makes portions of the IGZO layer contacting the source and the drain to have conductor property, thereby avoiding the prior art's complex process, simplifying the manufacturing of the IGZO TFT, and enhancing the production efficiency.
Public/Granted literature
- US20180301545A1 THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2018-10-18
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