Invention Grant
- Patent Title: APD focal plane arrays with backside vias
-
Application No.: US15913632Application Date: 2018-03-06
-
Publication No.: US10367111B2Publication Date: 2019-07-30
- Inventor: Brian Piccione , Mark Allen Itzler
- Applicant: ARGO AI, LLC
- Applicant Address: US PA Pittsburgh
- Assignee: ARGO AI, LLC
- Current Assignee: ARGO AI, LLC
- Current Assignee Address: US PA Pittsburgh
- Agency: Kaplan Breyer Schwarz, LLP
- Main IPC: H01L31/107
- IPC: H01L31/107 ; H01L27/146 ; H01L31/02 ; H01L31/0304 ; H01L31/0232
Abstract:
An avalanche photodiode (APD) array with reduced cross talk comprises, in the illustrative embodiment, a 2D array of Geiger-mode APDs, wherein a via is formed partially through the backside (substrate) of each APD in the array, wherein the via is offset from the active region of each said APD.
Public/Granted literature
- US20180198016A1 APD Focal Plane Arrays with Backside Vias Public/Granted day:2018-07-12
Information query
IPC分类:
