Invention Grant
- Patent Title: Extended area of sputter deposited n-type and p-type thermoelectric legs in a flexible thin-film based thermoelectric device
-
Application No.: US15995110Application Date: 2018-05-31
-
Publication No.: US10367131B2Publication Date: 2019-07-30
- Inventor: Sridhar Kasichainula
- Applicant: Sridhar Kasichainula
- Agency: LegalForce RAPC Worldwide
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L35/34 ; H01L35/32 ; H01L35/08 ; H01L31/054 ; H02S10/10 ; H01L35/30 ; H02S40/44 ; H02S30/20

Abstract:
A method includes forming a thin-film based thermoelectric module by sputter depositing pairs of N-type and P-type thermoelectric legs electrically in contact with one another on corresponding electrically conductive pads on a flexible substrate having a dimensional thickness less than or equal to 25 μm, with the legs having extended areas compared to the corresponding electrically conductive pads, and rendering the formed thin-film based thermoelectric module flexible and less than or equal to 100 μm in dimensional thickness based on choices of fabrication processes. The method also includes encapsulating the formed thin-film based thermoelectric module with an elastomer to render the flexibility thereto. The elastomer encapsulation has a dimensional thickness less than or equal to 15 μm, and the flexibility enables an array of thin-film based thermoelectric modules to be completely wrappable and bendable around a system element from which the array is configured to derive thermoelectric power.
Public/Granted literature
Information query
IPC分类: