Invention Grant
- Patent Title: System and method for a variable flow transducer
-
Application No.: US14992615Application Date: 2016-01-11
-
Publication No.: US10367430B2Publication Date: 2019-07-30
- Inventor: David Tumpold , Alfons Dehe , Christoph Glacer
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: H02N1/00
- IPC: H02N1/00 ; H01L41/08 ; H01L41/09

Abstract:
According to an embodiment, a microelectromechanical systems MEMS transducer includes a deflectable membrane attached to a support structure, an acoustic valve structure configured to cause the deflectable membrane to be acoustically transparent in a first mode and acoustically visible in a second mode, and an actuating mechanism coupled to the deflectable membrane. Other embodiments include corresponding systems and apparatus, each configured to perform various embodiment methods.
Public/Granted literature
- US20170201192A1 System and Method for a Variable Flow Transducer Public/Granted day:2017-07-13
Information query