Invention Grant
- Patent Title: Corner coupling resonator array
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Application No.: US15388093Application Date: 2016-12-22
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Publication No.: US10367469B2Publication Date: 2019-07-30
- Inventor: Ville Kaajakari
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Agency: Arent Fox LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/205 ; H03H9/50 ; H03H9/15 ; H03H9/24

Abstract:
A MEMS resonator array is provided with improved electrical characteristics and reduced motional impedance at high frequency applications. The MEMS resonator array includes a pair of first piezoelectric resonators that are opposed to each other with a space defined therebetween. Moreover, the MEMS resonator array includes a pair of second piezoelectric resonators that are opposed to each other and that are each coupled to respective corners of each of the first piezoelectric resonators. As such, each of the second piezoelectric resonators is partially disposed in the space defined between the pair of first piezoelectric resonators.
Public/Granted literature
- US20180183403A1 CORNER COUPLING RESONATOR ARRAY Public/Granted day:2018-06-28
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