Process for producing sputtering target and sputtering target
Abstract:
A process for producing a sputtering target in which a target material is diffusion-bonded to a top face of a backing plate material, the process comprising:a step of heating the top face of the target material by a hot plate while pressing from above thereby diffusion-bonding the target material to the backing plate material in such a manner that the step is performed at a center part prior to an outer peripheral part of the top face.
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