Control device for actuator, actuator, valve driving device and control method for actuator
Abstract:
A position sensor mounted in an actuator includes a magnetic detecting element for detecting the position of a shaft, and a temperature detecting element for detecting intra-sensor temperature which is used for correction of the temperature characteristics of the magnetic detecting element, the magnetic detecting element and the temperature detecting element being built therein. A control device for the actuator acquires both the temperature-corrected position of the shaft and the intra-sensor temperature from the position sensor, and uses them for control of the actuator.
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