Systems and methods for a four-mass vibrating MEMS structure
Abstract:
Systems and methods for a four-mass vibrating mems structure are provided. In certain implementations, a MEMS sensor includes four proof masses, wherein each proof mass is driven such that the proof masses oscillate along radial lines extending from the center of the MEMS sensor through the center of the respective proof mass, each proof mass comprising a plurality of drive combs; and a plurality of sense combs. In further embodiments, the MEMS sensor includes at least one substrate having one or more drive electrodes for driving the four proof masses along the radial lines at a drive frequency, wherein a resonant frequency of a sense mode is different from the drive frequency.
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