Invention Grant
- Patent Title: Systems and methods for a four-mass vibrating MEMS structure
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Application No.: US15466784Application Date: 2017-03-22
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Publication No.: US10371521B2Publication Date: 2019-08-06
- Inventor: Burgess R. Johnson
- Applicant: Honeywell International Inc.
- Applicant Address: US NJ Morris Plains
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morris Plains
- Agency: Fogg & Powers LLC
- Main IPC: G01C19/574
- IPC: G01C19/574 ; G01C19/5656 ; G01C19/5712 ; G01C19/5747

Abstract:
Systems and methods for a four-mass vibrating mems structure are provided. In certain implementations, a MEMS sensor includes four proof masses, wherein each proof mass is driven such that the proof masses oscillate along radial lines extending from the center of the MEMS sensor through the center of the respective proof mass, each proof mass comprising a plurality of drive combs; and a plurality of sense combs. In further embodiments, the MEMS sensor includes at least one substrate having one or more drive electrodes for driving the four proof masses along the radial lines at a drive frequency, wherein a resonant frequency of a sense mode is different from the drive frequency.
Public/Granted literature
- US20180231384A1 SYSTEMS AND METHODS FOR A FOUR-MASS VIBRATING MEMS STRUCTURE Public/Granted day:2018-08-16
Information query
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