Invention Grant
- Patent Title: Method for locating a wafer in the ingot of same
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Application No.: US14909230Application Date: 2014-08-01
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Publication No.: US10371657B2Publication Date: 2019-08-06
- Inventor: Jordi Veirman , Sébastien Dubois
- Applicant: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oliff PLC
- Priority: FR1301875 20130802
- International Application: PCT/FR2014/000179 WO 20140801
- International Announcement: WO2015/015065 WO 20150205
- Main IPC: G01R27/08
- IPC: G01R27/08 ; G01N27/04 ; G01N21/95 ; H01L21/66 ; G01N21/3504 ; G01R31/26 ; G01N33/00

Abstract:
A method for determining the original position of a wafer in an ingot made from semiconductor material comprises the following steps: measuring the interstitial oxygen concentration in an area of the wafer; measuring the concentration of thermal donors formed in said area of the wafer during a previous solidification of the ingot; determining the effective time of a thermal donor formation anneal undergone by the wafer when solidification of the ingot took place, from the thermal donor concentration and the interstitial oxygen concentration; and determining the original position of the wafer in the ingot from the effective time.
Public/Granted literature
- US20160187278A1 METHOD FOR LOCATING A WAFER IN THE INGOT OF SAME Public/Granted day:2016-06-30
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