- Patent Title: Micro-electro-mechanical system and method for producing the same
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Application No.: US15235462Application Date: 2016-08-12
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Publication No.: US10373790B2Publication Date: 2019-08-06
- Inventor: Thomas Lisec , Fabian Stoppel
- Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Applicant Address: DE Munich
- Assignee: Fraunhofe-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofe-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee Address: DE Munich
- Agency: Perkins Coie LLP
- Agent Michael A. Glenn
- Priority: DE102014202763 20140214
- Main IPC: H01L41/09
- IPC: H01L41/09 ; H01H57/00 ; H01H59/00 ; F16K99/00 ; H01H47/00 ; H01H49/00

Abstract:
A micro-electro-mechanical system includes a deflectable actuator plate and an abutment area. An integral piezoelectric functional layer of the deflectable actuator plate is configured across an area APS of the actuator plate. The deflectable actuator plate is configured to effect a hollow warp in at least a controlled or non-controlled state, wherein the abutment area is disposed facing a hollow side of the deflectable actuator plate defined by the hollow warp. The deflectable actuator plate is configured to provide, in the state in which the same effects the hollow warp, mechanical contact between the deflectable actuator plate and the abutment area. In the other state, the deflectable actuator plate is disposed spaced apart from the abutment area.
Public/Granted literature
- US20160351366A1 MICRO-ELECTRO-MECHANICAL SYSTEM AND METHOD FOR PRODUCING THE SAME Public/Granted day:2016-12-01
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