Invention Grant
- Patent Title: Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber
-
Application No.: US14965030Application Date: 2015-12-10
-
Publication No.: US10373794B2Publication Date: 2019-08-06
- Inventor: Vince Burkhart , Christopher Ramsayer , Mohan Thilagaraj
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- Main IPC: H01J37/04
- IPC: H01J37/04 ; H01J37/244 ; H05B1/02 ; H05H1/48 ; H01J37/32

Abstract:
A circuit including a first filter assembly and a controller. The first filter assembly is implemented on a printed circuit board. The first filter assembly includes a first filter and a second filter. The first filter receives a first signal from a first sensor, prevents passage of a first portion of the first signal and outputs a second signal. The first portion of the first signal is at a first radio frequency. A second portion of the first signal is indicative of a first temperature of a first electrode in a plasma chamber. The second filter receives the second signal and prevents passage of a portion of the second signal. The portion of the second signal is at a second radio frequency. The second radio frequency is less than the first radio frequency. The controller adjusts a temperature of the first electrode based on an output of the second filter.
Public/Granted literature
Information query