Probe landing is detected by detecting a change in a vibration of the probe in a plane substantially parallel to the work piece surface as the probe is lowered toward the work piece. The vibration may be observed, for example, by acquiring multiple electron microscope images of the probe as it moves and analyzing the images the determine a characteristic, such as the amplitude of the vibration. When the probe contacts the work piece surface, the friction between the probe tip and the work piece surface will change the characteristic of the vibration, which can be detected to indicate that the probe has landed.