Invention Grant
- Patent Title: Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal
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Application No.: US16038076Application Date: 2018-07-17
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Publication No.: US10373805B2Publication Date: 2019-08-06
- Inventor: Hyungjoon Kim , Sunil Kapoor , Karl Leeser , Vince Burkhart
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/68 ; H01L21/683 ; C23C16/505 ; H01L21/687

Abstract:
An isolation system includes an input junction coupled to one or more RF power supplies via a match network for receiving radio frequency (RF) power. The isolation system further includes a plurality of channel paths connected to the input junction for distributing the RF power among the channel paths. The isolation system includes an output junction connected between each of the channel paths and to an electrode of a plasma chamber for receiving portions of the distributed RF power to output combined power and providing the combined RF power to the electrode. Each of the channel paths includes bottom and top capacitors for blocking a signal of the different type than that of the RF power. The isolation system avoids a risk of electrical arcing created by a voltage difference between an RF terminal and a non-RF terminal when the terminals are placed proximate to each other.
Public/Granted literature
- US20180323037A1 APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF TERMINAL TO ADJACENT NON-RF TERMINAL Public/Granted day:2018-11-08
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