- Patent Title: Density-controllable dummy fill strategy for near-MRAM periphery and far-outside-MRAM logic regions for embedded MRAM technology and method for producing the same
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Application No.: US15858655Application Date: 2017-12-29
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Publication No.: US10374005B2Publication Date: 2019-08-06
- Inventor: Pinghui Li , Haiqing Zhou , Liying Zhang , Wanbing Yi , Ming Zhu , Danny Pak-Chum Shum , Darin Chan
- Applicant: GLOBALFOUNDRIES Singapore Pte. ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: G11C5/02
- IPC: G11C5/02 ; H01L27/02 ; H01L27/22 ; H01L43/02 ; H01L43/08 ; H01L43/12

Abstract:
Methods of forming a MTJ dummy fill gradient across near-active-MRAM-cell periphery and far-outside-MRAM logic regions and the resulting device are provided. Embodiments include providing an embedded MRAM layout with near-active-MRAM-cell periphery logic and far-outside-MRAM logic regions; forming a MTJ structure within the layout based on minimum space and distance rules relative to a first metal layer, a second metal layer, and/or both the first and second metal layers; forming a high-density MTJ dummy structure in the near-active-MRAM-cell periphery logic region based on second minimum space and distance rules relative to a first metal layer, a second metal layer, and/or both the first metal layer and the second metal layer; and forming a low-density MTJ dummy structure in the far-outside-MRAM logic region based on third minimum space and distance rules relative to a first metal layer, a second metal layer, and/or both the first metal layer and the second metal layer.
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