Invention Grant
- Patent Title: Enhanced field bipolar resistive RAM integrated with FDSOI technology
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Application No.: US15962848Application Date: 2018-04-25
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Publication No.: US10374039B1Publication Date: 2019-08-06
- Inventor: Pouya Hashemi , Takashi Ando , Alexander Reznicek
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent L. Jeffrey Kelly, Esq.
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/08 ; H01L29/786 ; H01L29/10 ; H01L29/66 ; H01L45/00 ; H01L27/24

Abstract:
A resistive random access memory stack is formed on a surface of a faceted drain-side structure that is present on one side of a functional gate structure. The functional gate structure and the faceted drain-side structure are located on a topmost surface of a fully depleted semiconductor channel material layer. In some embodiments, the resistive random access memory stack includes a bottom electrode, a resistive switching layer and a top electrode. In other embodiments, the resistive random access memory stack includes a resistive switching layer and a top electrode. In such an embodiment, a drain-side metal semiconductor alloy of the faceted drain-side structure is used as the bottom electrode of the resistive random access memory device.
Information query
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