Invention Grant
- Patent Title: Integrated graphene detectors with waveguides
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Application No.: US15486849Application Date: 2017-04-13
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Publication No.: US10374106B2Publication Date: 2019-08-06
- Inventor: Ajey P. Jacob
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDARIES INC.
- Current Assignee: GLOBALFOUNDARIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: G02B6/12
- IPC: G02B6/12 ; H01L31/18 ; H01L27/144 ; H01L31/105 ; H01L31/0232 ; H01L31/0352 ; H01L31/0392

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to graphene detectors integrated with optical waveguide structures and methods of manufacture. The structure includes a plurality of non-planar fin structures composed of substrate material, and a non-planar sheet of graphene material extending entirely over each of the plurality of non-planar fin structures.
Public/Granted literature
- US20180301569A1 INTEGRATED GRAPHENE DETECTORS WITH WAVEGUIDES Public/Granted day:2018-10-18
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