Invention Grant
- Patent Title: Piezoelectric device for ultrasonic sensor
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Application No.: US15379949Application Date: 2016-12-15
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Publication No.: US10374140B2Publication Date: 2019-08-06
- Inventor: Takayuki Yonemura , Tomohide Onogi , Chikara Kojima
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2015-246728 20151217
- Main IPC: H01L41/047
- IPC: H01L41/047 ; B06B1/06 ; H01L41/09

Abstract:
A piezoelectric device includes a substrate with a cavity, a vibrating plate which is provided on the substrate so as to block an opening surface of the cavity, and a piezoelectric element which is provided on a surface of the vibrating plate opposite to the cavity, including a first electrode, a piezoelectric layer, and a second electrode, in which the second electrode has a laminated structure including a Pt layer (lower layer side electrode) and an Ir layer (upper layer side electrode), in which the Pt layer is in contact with the piezoelectric layer, and in which, if it is assumed that two directions which are parallel to a surface of the substrate and mutually perpendicular are defined as an X direction and a Y direction, the Ir layer is extended to an outside of the cavity at least in the X direction on an X-Y plane view.
Public/Granted literature
- US20170179365A1 PIEZOELECTRIC DEVICE FOR ULTRASONIC SENSOR Public/Granted day:2017-06-22
Information query
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