Invention Grant
- Patent Title: Method of manufacturing an acoustic wave element
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Application No.: US15430865Application Date: 2017-02-13
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Publication No.: US10374570B2Publication Date: 2019-08-06
- Inventor: Tomohiro Iwasaki , Hiroyuki Nakamura
- Applicant: SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Applicant Address: JP Kadoma-Shi
- Assignee: SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Current Assignee: SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Current Assignee Address: JP Kadoma-Shi
- Agency: Lando & Anastasi, LLP
- Priority: JP2014-152547 20140728
- Main IPC: H03H3/08
- IPC: H03H3/08 ; H01P5/12 ; H03H9/02 ; H03H9/72 ; H01P1/213 ; H01P11/00

Abstract:
A method of manufacturing an acoustic wave element includes simultaneously forming a plurality of electrodes on a piezoelectric substrate, the plurality of electrodes including first and second IDT electrodes and a connection electrode, forming an insulation over the plurality of electrodes and the piezoelectric substrate, the insulation having a first thickness in a direction perpendicular to the surface of the piezoelectric substrate over the second IDT electrode, processing a first portion of the insulation over the first IDT electrode and a second portion of the insulation over the connection electrode to reduce a thickness of the first and second portions of the insulation to a second thickness, and processing a third portion of the insulation over the surface of the second IDT electrode to reduce the first thickness of the third portion to a third thickness, the third thickness being greater than the second thickness.
Public/Granted literature
- US20170155370A1 ACOUSTIC WAVE ELEMENTS AND ANTENNA DUPLEXERS, AND MODULES AND ELECTRONIC DEVICES USING SAME Public/Granted day:2017-06-01
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