Invention Grant
- Patent Title: MEMS device and process
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Application No.: US15636019Application Date: 2017-06-28
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Publication No.: US10375483B2Publication Date: 2019-08-06
- Inventor: Scott Lyall Cargill
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: US TX Austin
- Assignee: Cirrus Logic, Inc.
- Current Assignee: Cirrus Logic, Inc.
- Current Assignee Address: US TX Austin
- Agency: Jackson Walker L.L.P.
- Priority: GB1611382.1 20160630; WOPCT/GB2016/051975 20160630
- Main IPC: H04R19/04
- IPC: H04R19/04 ; B81B3/00 ; B81C1/00 ; B81B7/00 ; H04R7/18 ; H04R19/00
Abstract:
The application describes MEMS transducers comprising a flexible membrane supported at a supporting edge relative to a substrate and further comprising one or more unbound edges. The shape of the unbound edge is selected so that the flexible membrane tends to bend along more than one bend axis in the region of the supporting edge.
Public/Granted literature
- US20180007473A1 MEMS DEVICE AND PROCESS Public/Granted day:2018-01-04
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