Invention Grant
- Patent Title: Photoresist composition
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Application No.: US12875627Application Date: 2010-09-03
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Publication No.: US10377692B2Publication Date: 2019-08-13
- Inventor: Akira Kamabuchi , Yuko Yamashita
- Applicant: Akira Kamabuchi , Yuko Yamashita
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Hogan Lovells US LLP
- Priority: JP2009-207964 20090909; JP2009-292266 20091224; JP2010-167946 20100727; JP2010-167947 20100727
- Main IPC: C07C61/135
- IPC: C07C61/135 ; G03F7/004 ; G03F7/039

Abstract:
A photoresist composition comprising a resin which comprises a structural unit derived from a compound having an acid-labile group and which is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, an acid generator and a compound represented by the formula (I′): wherein R51, R52, R53 and R54 independently each represent a C1-C8 alkyl group, and A11 represents a C3-C36 divalent saturated cyclic hydrocarbon group which can contain one or more heteroatoms and which have one or more substituents or a C6-C20 divalent aromatic hydrocarbon group which can contain one or more heteroatoms and which have one or more substituents.
Public/Granted literature
- US20110059400A1 PHOTORESIST COMPOSITION Public/Granted day:2011-03-10
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