- Patent Title: Control of etch rate using modeling, feedback and impedance match
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Application No.: US15463875Application Date: 2017-03-20
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Publication No.: US10381201B2Publication Date: 2019-08-13
- Inventor: Bradford J. Lyndaker , John C. Valcore, Jr. , Seyed Jafar Jafarian-Tehrani , Zhigang Chen , Alexei Marakhtanov
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: H01J37/32
- IPC: H01J37/32 ; G05B17/02 ; H03H7/40 ; H05H1/46

Abstract:
A method for achieving an etch rate is described. The method includes receiving a calculated variable associated with processing a work piece in a plasma chamber. The method further includes propagating the calculated variable through a model to generate a value of the calculated variable at an output of the model, identifying a calculated processing rate associated with the value, and identifying based on the calculated processing rate a pre-determined processing rate. The method also includes identifying a pre-determined variable to be achieved at the output based on the pre-determined processing rate and identifying a characteristics associated with a real and imaginary portions of the pre-determined variable. The method includes controlling variable circuit components to achieve the characteristics to further achieve the pre-determined variable.
Public/Granted literature
- US20170194130A1 CONTROL OF ETCH RATE USING MODELING, FEEDBACK AND IMPEDANCE MATCH Public/Granted day:2017-07-06
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