Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US15719101Application Date: 2017-09-28
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Publication No.: US10381353B2Publication Date: 2019-08-13
- Inventor: Jenn-Gwo Hwu , Samuel C. Pan , Chien-Shun Liao , Kuan-Hao Tseng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. , NATIONAL TAIWAN UNIVERSITY
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/94

Abstract:
A semiconductor memory device includes a transistor having a gate, a source and a drain and a metal-insulator-semiconductor (MIS) structure. The transistor and the MIS structure are disposed on a common substrate. The MIS structure includes a dielectric layer disposed on a semiconductor region, and an electrode electrically disposed on the dielectric layer and coupled to the drain of the transistor. The electrode includes a bulk portion and a high-resistance portion, both disposed on the dielectric layer. The high-resistance portion has a resistance value in a range from 1.0×10−4 Ωcm to 1.0×104 Ωcm or a sheet resistance in a range from 1.0×102Ω/□ to 1.0×1010Ω/□.
Public/Granted literature
- US20180308851A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2018-10-25
Information query
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