Semiconductor memory device
Abstract:
A semiconductor memory device includes a transistor having a gate, a source and a drain and a metal-insulator-semiconductor (MIS) structure. The transistor and the MIS structure are disposed on a common substrate. The MIS structure includes a dielectric layer disposed on a semiconductor region, and an electrode electrically disposed on the dielectric layer and coupled to the drain of the transistor. The electrode includes a bulk portion and a high-resistance portion, both disposed on the dielectric layer. The high-resistance portion has a resistance value in a range from 1.0×10−4 Ωcm to 1.0×104 Ωcm or a sheet resistance in a range from 1.0×102Ω/□ to 1.0×1010Ω/□.
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