Invention Grant
- Patent Title: Variable resolution spectrometer
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Application No.: US16226597Application Date: 2018-12-19
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Publication No.: US10386233B2Publication Date: 2019-08-20
- Inventor: Mark Allen Neil
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Main IPC: G01J3/02
- IPC: G01J3/02 ; G01J3/06 ; G01J3/12 ; G01J3/18 ; G01J3/28 ; G02B6/293 ; G03F7/20 ; G01B11/02 ; G01B11/14 ; G01N21/21 ; G01N21/47 ; G01N21/55

Abstract:
Systems, methods, apparatuses, and articles of manufacture are provided for recovering a digitized spectrum and may comprise: an optical system configured to transform rays, the optical system including a diffraction grating, a steering mirror, a stage, and an actuator configured to move one of the stage, diffraction grating, or steering mirror according to a movement regime to vary an incidence of the rays on the stage; a sensor array disposed on the stage configured to receive the rays incident from the optical system at a plurality of measurement locations to obtain a plurality of ray spectra; and a processor electrically connected to the sensor array configured to receive the ray spectra, interleave the ray spectra to yield an interleaved spectrum, and deconvolve a point spread function corresponding to the optical system from the interleaved spectrum to yield a recovered digitized spectrum.
Public/Granted literature
- US20190212255A1 VARIABLE RESOLUTION SPECTROMETER Public/Granted day:2019-07-11
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