Invention Grant
- Patent Title: System for measuring levels of radiation reflecting from semiconductor material for use in measuring the dopant content thereof
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Application No.: US15507545Application Date: 2015-08-28
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Publication No.: US10386310B2Publication Date: 2019-08-20
- Inventor: Stephen Warren Blaine
- Applicant: Aurora Solar Technologies (Canada) Inc.
- Applicant Address: CA North Vancouver
- Assignee: Aurora Solar Technologies (Canada) Inc.
- Current Assignee: Aurora Solar Technologies (Canada) Inc.
- Current Assignee Address: CA North Vancouver
- Agency: Norton Rose Fulbright Canada LLP
- International Application: PCT/CA2015/050829 WO 20150828
- International Announcement: WO2016/209321 WO 20160303
- Main IPC: G01J3/433
- IPC: G01J3/433 ; G01N21/95 ; H01L31/18 ; G01J3/02 ; G01N21/55 ; H01L21/66 ; G01N21/3563

Abstract:
A system and method of non-contact measurement of the dopant content of semiconductor material by reflecting infrared (IR) radiation off of the material into an integrating sphere to scatter the received radiation and passing portions of the radiation through band pass filters of differing wavelength ranges, comparing the level of energy passed through each filter and calculating the dopant content by referencing a correlation curve made up of known wafer dopant content for that system.
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