- Patent Title: System and method for defect detection using multi-spot scanning
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Application No.: US15803789Application Date: 2017-11-05
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Publication No.: US10386311B1Publication Date: 2019-08-20
- Inventor: Amir Shoham , Yoav Berlatzky , Haim Feldman
- Applicant: Applied Materials Israel, Ltd.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL, LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL, LTD.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G01B11/30
- IPC: G01B11/30 ; G01N21/956

Abstract:
A system that may include a radiation source to generate a beam of coherent radiation; traveling lens optics to focus the beam so as to generate multiple spots on a surface of a sample and to scan the spots together over the surface; collection optics to collect the radiation scattered from the multiple spots and to focus the collected radiation so as to generate a pattern of interference fringes; and a detection unit to detect changes in the pattern of interference fringes.
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