Invention Grant
- Patent Title: Pressure change measuring apparatus and pressure change measuring method
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Application No.: US15316607Application Date: 2014-06-25
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Publication No.: US10393608B2Publication Date: 2019-08-27
- Inventor: Yoko Shinohara , Takeshi Uchiyama , Manabu Oumi , Masayuki Suda
- Applicant: SEIKO INSTRUMENTS INC.
- Applicant Address: JP
- Assignee: SEIKO INSTRUMENTS INC.
- Current Assignee: SEIKO INSTRUMENTS INC.
- Current Assignee Address: JP
- Agency: Adams & Wilks
- International Application: PCT/JP2014/066791 WO 20140625
- International Announcement: WO2015/198414 WO 20151230
- Main IPC: G01L23/10
- IPC: G01L23/10 ; G01L9/00

Abstract:
An arithmetic processing unit included in a pressure change measuring apparatus includes a differential pressure calculation unit configured to obtain a pressure difference between an inner pressure of a cavity and a pressure to be measured based on an output signal of a differential pressure measuring cantilever. A pressure-to-be-measured calculating unit calculates the pressure to be measured based on a set inner pressure of the cavity and the differential pressure calculated by the differential pressure calculation unit. A flow rate calculating unit calculates a flowing quantity of a pressure transmission medium flowing into and out of the cavity for every unit of a predetermined time period based on the differential pressure calculated by the differential pressure calculation unit. An inner pressure updating unit calculates the inner pressure of the cavity after the predetermined time period based on the flowing quantity calculated by the flow rate calculating unit and a volume of the cavity, and updates, to the calculated inner pressure, a set value of the inner pressure of the cavity to be used by the pressure-to-be-measured calculating unit.
Public/Granted literature
- US20170160162A1 PRESSURE CHANGE MEASURING APPARATUS AND PRESSURE CHANGE MEASURING METHOD Public/Granted day:2017-06-08
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