Invention Grant
- Patent Title: Polarizer assembly for spatially separation polarization states of a light beam
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Application No.: US14862292Application Date: 2015-09-23
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Publication No.: US10394041B2Publication Date: 2019-08-27
- Inventor: Markus Bauer , Holger Muenz
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102013103282 20130402
- Main IPC: G02B27/28
- IPC: G02B27/28 ; G02B27/12 ; G02B5/30 ; F21V9/14

Abstract:
The disclosure provides to a birefringent polarizer assembly for spatially separating polarization states of a light beam, in particular in the spectral range below 300 nm. The assembly includes a first prism on the light input side and a further prism on the light output side, which are arranged along a principal light incidence direction. The first prism has a first light entrance surface and a first light exit surface. The further prism has a further light entrance surface, facing the first light exit surface, and a further light exit surface. The prisms in each case have an optical principal crystal axis oriented substantially perpendicularly to the principal light incidence direction. The crystal axes of two adjacent prisms are oriented perpendicularly to one another. A normal to the further light exit surface forms an angle not equal to 0° with the principal light incidence direction.
Public/Granted literature
- US20160018664A1 Polarizer Assembly For Spatially Separation Polarization States Of A Light Beam Public/Granted day:2016-01-21
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