Method of real time in-situ chamber condition monitoring using sensors and RF communication

Invention Grant

US10395904B2 Method of real time in-situ chamber condition monitoring using sensors and RF communication 有权

Please log in to see more content

Patent Title: Method of real time in-situ chamber condition monitoring using sensors and RF communication
Application No.: US16198297

Application Date: 2018-11-21
Publication No.: US10395904B2

Publication Date: 2019-08-27
Inventor: Lawrence Wong , Kartik Ramaswamy , Yang Yang , Steven Lane , Richard Fovell
Applicant: Applied Materials, Inc.
Applicant Address: US CA Santa Clara
Assignee: Applied Materials, Inc.
Current Assignee: Applied Materials, Inc.
Current Assignee Address: US CA Santa Clara
Agency: Fish & Richardson P.C.
Main IPC: G06F19/00
IPC: G06F19/00 ; H01J37/32 ; H01L21/67 ; C23F1/00 ; H01L21/677

Method of real time in-situ chamber condition monitoring using sensors and RF communication

Abstract:

Plural sensors on an interior surface of a reactor chamber are linked by respective RF communication channels to a hub inside the reactor chamber, which in turn is linked to a process controller outside of the chamber.

Public/Granted literature

US20190096641A1 Method of Real Time In-Situ Chamber Condition Monitoring Using Sensors and Rf Communication Public/Granted day:2019-03-28

Information query

Espacenet