Invention Grant
- Patent Title: High density stocker with interlocking nubs
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Application No.: US15791627Application Date: 2017-10-24
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Publication No.: US10395960B2Publication Date: 2019-08-27
- Inventor: Gerhard Dovids , Yves Fenner , John Fiddes , Christian Wohanka , Bernd Rahrbach
- Applicant: MURATA MACHINERY, LTD.
- Applicant Address: JP Kyoto
- Assignee: MURATA MACHINERY, LTD.
- Current Assignee: MURATA MACHINERY, LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67 ; B25J9/16 ; B65G37/02 ; B65G37/00 ; B65G1/137 ; H01L21/673

Abstract:
A substrate stocker system includes a high-density storage chamber that comprises one or more stacks of one or more substrates in a closed position, one or more low density containers that are configured to store one or more substrates in an open position, one or more opener stations that are configured to receive one or more substrates and includes one or more separator modules for changing one or more distances between corresponding one or more adjacent substrates. The substrate stocker system further includes a first robot configured to move one or more stacks between the high-density storage chamber, and the one or more opener station, and a second robot configured to move the individual one or more substrates between the one or more opener stations and the one or more low density containers.
Public/Granted literature
- US20180122677A1 HIGH DENSITY STOCKER Public/Granted day:2018-05-03
Information query
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