Invention Grant
- Patent Title: Semiconductor device having a temperature-detecting diode
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Application No.: US15228249Application Date: 2016-08-04
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Publication No.: US10396065B2Publication Date: 2019-08-27
- Inventor: Takeyoshi Nishimura
- Applicant: FUJI ELECTRIC CO., LTD.
- Applicant Address: JP Kawasaki-Shi
- Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Rabin & Berdo, P.C.
- Priority: JP2012-177381 20120809
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01L29/94 ; H01L49/02 ; H01L27/06 ; H01L29/866 ; H01L29/66 ; H01L29/78 ; H01L29/06 ; H01L29/739

Abstract:
A capacitive component region is formed below a temperature detecting diode or below a protective diode. In addition, the capacitive component region is formed below an anode metal wiring line connecting the temperature detecting diode and an anode electrode pad and below a cathode metal wiring line connecting the temperature detecting diode and a cathode electrode pad. The capacitive component region is an insulating film interposed between polysilicon layers. Specifically, a first insulating film, a polysilicon conductive layer, and a second insulating film are sequentially formed on a first main surface of a semiconductor substrate, and the temperature detecting diode, the protective diode, the anode metal wiring line, or the cathode metal wiring line is formed on the upper surface of the second insulating film. Therefore, it is possible to improve the static electricity resistance of the temperature detecting diode or the protective diode.
Public/Granted literature
- US20160343700A1 SEMICONDUCTOR DEVICE Public/Granted day:2016-11-24
Information query
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