Invention Grant
- Patent Title: Piezoelectric element, piezoelectric microphone, piezoelectric resonator and method for manufacturing piezoelectric element
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Application No.: US15909016Application Date: 2018-03-01
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Publication No.: US10397708B2Publication Date: 2019-08-27
- Inventor: Keiichi Umeda , Takaaki Mizuno
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Agency: Arent Fox LLP
- Priority: JP2015-235504 20151202
- Main IPC: H01L41/113
- IPC: H01L41/113 ; H04R17/02 ; H01L41/187 ; H01L41/316 ; H04R17/10 ; H03H3/02 ; H03H9/02 ; H03H9/17 ; H04R31/00

Abstract:
A piezoelectric element includes a first piezoelectric layer which has a first polarization axis direction in a thickness direction of the first piezoelectric layer and is made of AlN. A second piezoelectric layer made of GeAlN which is deposited on the first piezoelectric layer and has a second polarization axis direction opposite to the first polarization axis direction. A first electrode is provided on a side of the first piezoelectric layer which is opposite from a side where the second piezoelectric layer is disposed. A second electrode provided on a side of the second piezoelectric layer which is opposite from a side where the first piezoelectric layer is disposed.
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