Invention Grant
- Patent Title: Method for controlling resistivity and N-type silicon single crystal
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Application No.: US15503949Application Date: 2015-08-14
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Publication No.: US10400353B2Publication Date: 2019-09-03
- Inventor: Ryoji Hoshi , Hiroyuki Kamada , Kiyotaka Takano
- Applicant: SHIN-ETSU HANDOTAI CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-175999 20140829
- International Application: PCT/JP2015/004048 WO 20150814
- International Announcement: WO2016/031164 WO 20160303
- Main IPC: C30B29/06
- IPC: C30B29/06 ; C30B15/04 ; C30B15/20 ; H01L29/167 ; H01L29/739

Abstract:
A method controls a resistivity of a grown silicon single crystal by using a dopant when the silicon single crystal is grown by CZ method, including the steps of initially doping with a primary dopant such that the silicon single crystal has a predetermined conductive type and additionally doping with a secondary dopant having a conductive type opposite to that of the primary dopant continuously or intermittently, according to a solidification rate expressed by (crystalized weight)/(initial weight of silicon raw material) while growing the silicon single crystal, wherein in the additional doping step, the additional doping with the secondary dopant is carried out when the solidification rate is a predetermined value α or more, while the crystal is not doped with the secondary dopant until the solidification rate reaches the predetermined value α.
Public/Granted literature
- US20170260645A1 METHOD FOR CONTROLLING RESISTIVITY AND N-TYPE SILICON SINGLE CRYSTAL Public/Granted day:2017-09-14
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