Invention Grant
- Patent Title: Vacuum valve and vacuum pump
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Application No.: US15863895Application Date: 2018-01-06
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Publication No.: US10400775B2Publication Date: 2019-09-03
- Inventor: Masaya Nakamura , Junichiro Kozaki , Atsuo Nakatani , Nobuyuki Hirata
- Applicant: SHIMADZU CORPORATION
- Applicant Address: JP Kyoto
- Assignee: Shimadzu Corporation
- Current Assignee: Shimadzu Corporation
- Current Assignee Address: JP Kyoto
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: JP2017-003448 20170112
- Main IPC: F04D27/00
- IPC: F04D27/00 ; F16K31/04 ; F16K51/02 ; F16K3/06 ; F04D19/04 ; H01L21/67 ; F04D29/40 ; F04D25/06

Abstract:
A vacuum valve attached to a vacuum pump configured to generate regenerative power to perform a stop operation upon blackout, comprises: a first power input section to which power is input from a commercial power source; a second power input section to which the regenerative power generated at the vacuum pump is input; and a valve source circuit to which the power input to each of the first and second power input sections is supplied. When the power from the commercial power source is supplied to the first power input section, the vacuum valve is operated by the supplied power, and when the power from the commercial power source is stopped, the vacuum valve is operated by the regenerative power.
Public/Granted literature
- US20180195519A1 VACUUM VALVE AND VACUUM PUMP Public/Granted day:2018-07-12
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