Piezo actuator type valve
Abstract:
The disclosed embodiments include a valve assembly (300) that includes a piezo stack (308); a piezo actuator (306) encompassing the piezo stack, the piezo actuator having flexural elements (304) that provide a stroke multiplier that amplifies movement of the piezo stack; a valve block (318) having an inlet flow path (320) and an outlet flow path (322); a diaphragm (314) seated atop the valve block, wherein an outer part of the diaphragm is rigid and an inner part of the diaphragm is moveable in a vertical axis; and a bi-lateral flexure (312), wherein a bottom part of the piezo actuator is mechanically attached to the diaphragm via the bi-lateral flexure.
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