Constant temperature liquid circulation apparatus and temperature adjustment method for constant temperature liquid
Abstract:
A cooling liquid circulation apparatus comprising a liquid for a circuit which circularly supplies a liquid for adjusting temperature of a load, a refrigeration circuit which adjusts the temperature of the liquid by thermal exchange with a coolant to a set temperature, and a control unit which controls the overall apparatus. A temperature adjustment method by connecting in series and circularly of a circuit to circularly supply the liquid for adjusting temperature to a load and a refrigeration circuit for adjusting the temperature of the liquid with a coolant by heat exchange.
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