Invention Grant
- Patent Title: Position detection apparatus, force sensor, and apparatus
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Application No.: US15451471Application Date: 2017-03-07
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Publication No.: US10401152B2Publication Date: 2019-09-03
- Inventor: Chihiro Nagura
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2016-049748 20160314
- Main IPC: G01B11/14
- IPC: G01B11/14 ; G02B27/42 ; G01L1/24 ; G01L1/00

Abstract:
A position detection apparatus that illuminates light from a light source unit onto an object and that receives reflected light from the object on a light receiver to detect position information of the object, includes a detector (10) and a signal processor (102), the detector includes a first grating (15) in an optical path between the light source unit and the object, a second grating (16) in an optical path between the object and the light receiver, and a third grating (17) in an optical path between the second grating and the light receiver, the signal processor acquires the position information of the object based on a phase variation of the second periodic image detected by the light receiver, and the position information of the object is information related to a distance from the detector to the object.
Public/Granted literature
- US20170261311A1 POSITION DETECTION APPARATUS, FORCE SENSOR, AND APPARATUS Public/Granted day:2017-09-14
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