Invention Grant
- Patent Title: Calculation method, measurement apparatus, storage medium, and information processing apparatus
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Application No.: US14859496Application Date: 2015-09-21
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Publication No.: US10401163B2Publication Date: 2019-09-03
- Inventor: Tetsuji Oota
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2014-197507 20140926
- Main IPC: G01B21/04
- IPC: G01B21/04
Abstract:
The present invention provides a calculation method of calculating a shape of a surface to be measured, including a step of, based on an inclination angle of the surface in a scan direction of a probe, determining a first correction parameter used to correct a measurement error caused by scanning the probe in the first direction and a second correction parameter used to correct a measurement error caused by scanning the probe in the second direction.
Public/Granted literature
- US20160091295A1 CALCULATION METHOD, MEASUREMENT APPARATUS, STORAGE MEDIUM, AND INFORMATION PROCESSING APPARATUS Public/Granted day:2016-03-31
Information query
