Invention Grant
- Patent Title: Pressure sensor chip
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Application No.: US15300533Application Date: 2015-03-09
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Publication No.: US10401248B2Publication Date: 2019-09-03
- Inventor: Tomohisa Tokuda , Yoshiyuki Ishikura
- Applicant: Azbil Corporation
- Applicant Address: JP Chiyoda-ku
- Assignee: AZBIL CORPORATION
- Current Assignee: AZBIL CORPORATION
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2014-071064 20140331
- International Application: PCT/JP2015/056783 WO 20150309
- International Announcement: WO2015/151728 WO 20151008
- Main IPC: G10L13/02
- IPC: G10L13/02 ; G01L19/14 ; G01L13/02 ; G01L9/00 ; G01L19/06

Abstract:
A pressure sensor chip according to the present invention includes a non-bonding region that is provided in a stopper member and connected to a periphery of a pressure introduction hole. A plurality of protrusions are discretely formed on at least one of a first surface and a second surface that face each other in the non-bonding region. Passages between the protrusions serve as channels between the periphery of the pressure introduction hole and a peripheral edge of the non-bonding region. Accordingly, stress concentration does not occur at a diaphragm edge and the expected withstand pressure can be obtained.
Public/Granted literature
- US20170176279A1 PRESSURE SENSOR CHIP Public/Granted day:2017-06-22
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