Invention Grant
- Patent Title: Apparatus for measuring surface properties of polishing pad
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Application No.: US14024405Application Date: 2013-09-11
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Publication No.: US10401285B2Publication Date: 2019-09-03
- Inventor: Hisanori Matsuo , Keiichi Kimura , Keisuke Suzuki , Panart Khajornrungruang , Takashi Kushida
- Applicant: EBARA CORPORATION , Kyushu Institute of Technology
- Applicant Address: JP Tokyo JP Fukuoka
- Assignee: EBARA CORPORATION,Kyushu Institute of Technology
- Current Assignee: EBARA CORPORATION,Kyushu Institute of Technology
- Current Assignee Address: JP Tokyo JP Fukuoka
- Agency: Baker & Hostetler LLP
- Priority: JP2013-49685 20130312
- Main IPC: G01B11/30
- IPC: G01B11/30 ; G01N21/47 ; B24B37/005

Abstract:
The present invention relates to an apparatus for measuring surface properties of a polishing pad which measures surface properties such as surface topography or surface condition of a polishing pad used for polishing a substrate such as a semiconductor wafer. The apparatus for measuring surface properties of a polishing pad includes a laser beam source configured to emit a laser beam, and a photodetector configured to detect scattered light that is reflected and scattered by the polishing pad, an optical Fourier transform being performed on the detected scattered light to produce an intensity distribution corresponding to a spatial wavelength spectrum based on surface topography of the polishing pad. The laser beam is applied to the polishing pad at such an incident angle that the laser beam does not reach a bottom portion of a pore formed in the surface of the polishing pad.
Public/Granted literature
- US20140262027A1 APPARATUS FOR MEASURING SURFACE PROPERTIES OF POLISHING PAD Public/Granted day:2014-09-18
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