Invention Grant
- Patent Title: Standing wave interferometric microscope
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Application No.: US15880945Application Date: 2018-01-26
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Publication No.: US10401291B2Publication Date: 2019-09-03
- Inventor: Rainer Daum , Xaver Voegele
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI COMPANY
- Current Assignee: FEI COMPANY
- Current Assignee Address: US OR Hillsboro
- Priority: EP15190749 20151021
- Main IPC: G01N21/64
- IPC: G01N21/64 ; G02B21/14 ; G02B21/16 ; G02B27/58 ; G01N21/45 ; G02B21/06 ; G02B21/08 ; G02B21/18 ; G02B21/36 ; G02B21/00

Abstract:
A standing wave interferometric microscope is disclosed herein. An example microscope may include an illuminator, for illuminating a specimen with a standing wave of input radiation at an analysis location to cause the specimen to fluoresce, the specimen arranged in the analysis location, a pair of projection systems, arranged at opposite sides of the analysis location, coupled to collect at least a portion of the fluorescence and direct a corresponding pair of fluorescence light beams into a respective pair of inputs of an optical combining element, a wavefront modifier for producing astigmatism in at least one of the fluorescence light beams entering the optical combining element, and a detector for examining output light from said combining element.
Public/Granted literature
- US20180195962A1 STANDING WAVE INTERFEROMETRIC MICROSCOPE Public/Granted day:2018-07-12
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