Invention Grant
- Patent Title: Plasma processing detection indicator
-
Application No.: US15117601Application Date: 2015-02-12
-
Publication No.: US10401338B2Publication Date: 2019-09-03
- Inventor: Marimo Mori
- Applicant: SAKURA COLOR PRODUCTS CORPORATION
- Applicant Address: JP Osaka-shi
- Assignee: SAKURA COLOR PRODUCTS CORPORATION
- Current Assignee: SAKURA COLOR PRODUCTS CORPORATION
- Current Assignee Address: JP Osaka-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2014-026849 20140214
- International Application: PCT/JP2015/053742 WO 20150212
- International Announcement: WO2015/122425 WO 20150820
- Main IPC: G01D7/00
- IPC: G01D7/00 ; G01N31/22 ; H01J37/32

Abstract:
This invention provides a plasma treatment detection indicator that uses a fibrous base material or a synthetic resin base material comprising a coloring pigment as a base material and in which fine fiber pieces or coloring pigment is prevented from being generated in a powder form from the base material in plasma treatment. More specifically, this invention provides a plasma treatment detection indicator comprising a base material and at least a color-changing layer that changes color in a plasma treatment atmosphere, the color-changing layer being disposed above part or all of a surface of the base material, (1) the base material being a fibrous base material or a synthetic resin base material comprising a coloring pigment, and (2) a resin-based or inorganic transparent cover layer that covers all of the surface of the base material being disposed between the base material and the color-changing layer.
Public/Granted literature
- US20160349222A1 PLASMA PROCESSING DETECTION INDICATOR Public/Granted day:2016-12-01
Information query