Invention Grant
- Patent Title: Compensating for a physical effect in an optical system
-
Application No.: US15349600Application Date: 2016-11-11
-
Publication No.: US10401704B2Publication Date: 2019-09-03
- Inventor: Robert Jay Rafac
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: DiBerardino McGovern IP Group LLC
- Main IPC: G02F1/33
- IPC: G02F1/33 ; G02B27/00 ; G03F7/20 ; G02F1/29

Abstract:
A wavefront of a light beam that exits an acousto-optic material is estimated; a control signal for an acousto-optic system that includes the acousto-optic material is generated, the control signal being based on the estimated wavefront of the light beam; andthe control signal is applied to the acousto-optic system to generate a frequency-chirped acoustic wave that propagates in the acousto-optic material, the frequency-chirped acoustic wave forming a transient diffractive element in the acousto-optic material, an interaction between the transient diffractive element and the light beam adjusting the wavefront of the light beam to compensate for a distortion of the wavefront of the light beam, the distortion of the wavefront being at least partially caused by a physical effect in the acousto-optic material.
Public/Granted literature
- US20180136541A1 COMPENSATING FOR A PHYSICAL EFFECT IN AN OPTICAL SYSTEM Public/Granted day:2018-05-17
Information query