Invention Grant
- Patent Title: Calibration method, measurement apparatus, exposure apparatus, and method of manufacturing article
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Application No.: US14324806Application Date: 2014-07-07
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Publication No.: US10401744B2Publication Date: 2019-09-03
- Inventor: Koichi Sentoku , Yoshinori Ohsaki , Osamu Morimoto , Takahiro Matsumoto
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2013-143894 20130709
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03F7/20 ; G01D5/244

Abstract:
The present invention provides a method for calibrating an encoder which includes a scale and a light receiving unit configured to receive light reflected by the scale, and detects a change in relative position between the scale and the light receiving unit, the method comprising a measurement step of measuring a deformation amount of a surface shape of the scale, a specifying step of specifying, based on a measurement result in the measurement step, a range which includes a portion of a surface of the scale, where the deformation amount exceeds a threshold, and within which a detection value of the encoder is corrected, and a determination step of determining a correction value for correcting the detection value of the encoder within the range specified in the specifying step.
Public/Granted literature
- US20150015861A1 CALIBRATION METHOD, MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2015-01-15
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