Invention Grant
- Patent Title: Multi-blade and processing method of workpiece
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Application No.: US16113496Application Date: 2018-08-27
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Publication No.: US10403520B2Publication Date: 2019-09-03
- Inventor: Byeongdeck Jang , Youngsuk Kim , Takahiro Ishii , Maki Sakai
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Disco Corporation
- Current Assignee: Disco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: JP2017-165963 20170830
- Main IPC: B24D5/12
- IPC: B24D5/12 ; H01L21/48 ; H01L21/56 ; H01L21/67 ; H01L21/78 ; H01L23/00 ; H01L23/31 ; H01L23/498 ; H01L23/552

Abstract:
A multi blade that processes semiconductor packages into a desired shape while dividing a package substrate includes plural cutting blades that divide the package substrate into the individual semiconductor packages and a spacer provided between two cutting blades adjacent to each other, and is configured in such a manner that the cutting blades and the spacer have the same rotation axis center. The outer surface of the spacer is formed into a transfer shape of the semiconductor package and is covered by an abrasive grain layer, and the upper surface of the package substrate is ground by the outer surface of the spacer simultaneously with cutting of the package substrate by the plural cutting blades.
Public/Granted literature
- US20190067050A1 MULTI-BLADE AND PROCESSING METHOD OF WORKPIECE Public/Granted day:2019-02-28
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