Invention Grant
- Patent Title: Dual-damascene zero-misalignment-via process for semiconductor packaging
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Application No.: US15859332Application Date: 2017-12-30
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Publication No.: US10403564B2Publication Date: 2019-09-03
- Inventor: Aleksandar Aleksov , Hiroki Tanaka , Robert A. May , Kristof Darmawikarta , Changhua Liu , Chung Kwang Tan , Srinivas Pietambaram , Sri Ranga Sai Boyapati
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L21/027
- IPC: H01L21/027 ; H01L21/48 ; H01L23/485 ; H01L23/498 ; H01L23/00

Abstract:
Techniques that can assist with fabricating a package layer that includes a plurality of dual-damascene zero-misalignment-vias (dual-damascene ZMVs) and a trace between the dual-damascene ZMVs are described. The disclosed techniques allow for the dual-damascene ZMVs and their corresponding trace to be plated simultaneously in a single step or operation. As such, there is little or no misalignment between the dual-damascene ZMVs, the trace, and the metal pads connected to the ZMVs. In this way, one or more of the embodiments described herein can assist with reducing manufacturing costs, reducing development time of fabricating a package layer, and with increasing the I/O density in a semiconductor package.
Public/Granted literature
- US20190206767A1 DUAL-DAMASCENE ZERO-MISALIGNMENT-VIA PROCESS FOR SEMICONDUCTOR PACKAGING Public/Granted day:2019-07-04
Information query
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