Invention Grant
- Patent Title: Finfet based ZRAM with convex channel region
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Application No.: US14581472Application Date: 2014-12-23
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Publication No.: US10403628B2Publication Date: 2019-09-03
- Inventor: Ravikumar Ramachandran , Reinaldo Ariel Vega
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Steven Meyers
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L27/108 ; H01L29/10 ; H01L29/165 ; H01L29/12

Abstract:
Embodiments of the present invention provide improved methods and structures for fabrication of capacitor-less DRAM devices, sometimes referred to as ZRAM devices. A channel is formed in a fin-type field effect transistor (finFET) that is comprised of a finned channel portion and a convex channel portion. The finned channel portion may be comprised of a first semiconductor material and the convex channel portion may be comprised of a second, different semiconductor material. In embodiments, a metal gate is disposed around the elongated surface of the channel region, but is not disposed on the short surface of the channel region. A first spacer is disposed adjacent to the gate and in direct physical contact with the short surface of the channel region, and a second spacer is disposed adjacent to the first spacer.
Public/Granted literature
- US20160181250A1 FINFET BASED ZRAM WITH CONVEX CHANNEL REGION Public/Granted day:2016-06-23
Information query
IPC分类: