Invention Grant
- Patent Title: Three-dimensional ferroelectric memory devices
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Application No.: US16102667Application Date: 2018-08-13
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Publication No.: US10403631B1Publication Date: 2019-09-03
- Inventor: Zhenyu Lu , Yushi Hu , Qian Tao
- Applicant: Wuxi Petabyte Technologies Co., Ltd.
- Applicant Address: CN Wuxi
- Assignee: Wuxi Petabyte Technologies Co., Ltd.
- Current Assignee: Wuxi Petabyte Technologies Co., Ltd.
- Current Assignee Address: CN Wuxi
- Agency: Bayes PLLC
- Main IPC: H01L27/11514
- IPC: H01L27/11514 ; G11C11/22 ; H01L21/768 ; G11C7/18 ; G11C8/14 ; H01L23/532

Abstract:
Embodiments of three-dimensional (3D) ferroelectric memory devices and methods for forming the ferroelectric memory devices are disclosed. In an example, a 3D ferroelectric memory device includes a substrate and a plurality of ferroelectric memory cells each extending vertically above the substrate. Each of the ferroelectric memory cells includes a capacitor and a transistor electrically connected to the capacitor. The capacitor includes a first electrode, a second electrode, and a ferroelectric layer disposed laterally between the first electrode and the second electrode. The transistor includes a channel structure, a gate conductor, and a gate dielectric layer disposed laterally between the channel structure and the gate conductor.
Information query
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