Invention Grant
- Patent Title: Silicon-based photodetectors with expanded bandwidth
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Application No.: US15610894Application Date: 2017-06-01
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Publication No.: US10403781B1Publication Date: 2019-09-03
- Inventor: Jeremy Nathan Munday
- Applicant: Jeremy Nathan Munday
- Applicant Address: US MD College Park
- Assignee: University of Maryland, College Park
- Current Assignee: University of Maryland, College Park
- Current Assignee Address: US MD College Park
- Agency: Rosenberg, Klein & Lee
- Main IPC: H01L27/15
- IPC: H01L27/15 ; H01L29/06 ; H01L31/02 ; H01L31/07 ; H01L31/105 ; H01L31/108 ; H01L31/0224

Abstract:
A hot carrier photodetector has been developed that absorbs approximately 80% of broadband infrared radiation by using a planar nanoscale back metal contact to silicon. Based on the principles of the hot carriers generation in ultrathin metal films, silicon-based CMOS image sensors are developed which operate in the IR diapason. The device uses absorption in an ultrathin metallic nanostructure to generate therein a non-equilibrium electron distribution which subsequently is injected into the silicon material via a Schottky contact at the Si body, thus generating a photoresponse to an incident IR radiation. A pixeled array including interconnected hot carriers metallic nanostructured cell(s) and traditional RGB elements is envisioned to enable RGB-IR imaging from a single silicon based wafer.
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